3D封装玻璃通孔高频特性分析与优化
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(1. 桂林电子科技大学 海洋工程学院, 广西 北海 536000;2. 桂林电子科技大学 机电工程学院, 广西 桂林 541000;3. 桂林电子科技大学 教学科技部, 广西 北海 536000)

作者简介:

黄根信(1992—),男(汉族),江西萍乡人,工程师,硕士,研究方向为微电子封装可靠性技术。

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中图分类号:

TN405

基金项目:

国家自然科学基金资助项目(62164002); 广西科技重大专项资助项目 (桂科 AA19046004 ); 广西自然科学基金资助项目(2020GXNSFAA159071)


High-Frequency Characteristic Analysis and Optimization of 3D-Packaging Through Glass Via
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(1. School of Ocean Engineering, Guilin University of Electronic Technology, Beihai, Guangxi 536000, P. R. China;2. School of Electro-Mechanical Engineering, Guilin University of Electronic Technology, Guiling, Guangxi 541000, P. R. China;3. Teaching and Technology Department, Guilin University of Electronic Technology, Beihai, Guangxi 536000, P. R. China)

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    摘要:

    建立了3D封装玻璃通孔(TGV)电磁仿真分析模型,对TGV高频信号特性进行了分析,得到了回波损耗S11仿真结果,并研究了信号频率、通孔类型、通孔最大直径、通孔高度、通孔最小直径对S11的影响。选取TGV关键结构通孔最大直径、通孔高度、通孔最小直径尺寸为设计参数,以TGV在信号频率10 GHz下的S11作为目标值,采用响应曲面法,设计17组试验进行仿真,并拟合了TGV S11与其关键结构参数的关系模型。结合遗传算法对拟合模型进行优化,得到TGV S11最优的组合参数:通孔最大直径65 μm、通孔高度360 μm、通孔最小直径尺寸44 μm。对最优组合参数进行验证,发现最优参数组合仿真结果较基本模型S11减小了1.593 5 dB,实现了TGV的结构优化。

    Abstract:

    A simulation analysis model of a 3D-packaging through glass via (TGV) was established. The high-frequency signal characteristics of TGV were analyzed, and the simulation results of the return loss (S11) were obtained. The influences of the signal frequency, type, maximum diameter, height, and minimum diameter of the TGV on the S11 were studied. The maximum diameter, height, and minimum diameter of the TGV were selected as the design parameters, and the S11 at 10 GHz was obtained as the target value. Seventeen groups of experimental simulation calculations were designed using the response surface method, and the relationship between the S11 of the TGV and its key structural parameters was fitted. The fitting model was optimized by combining a genetic algorithm, and the optimal combination parameters of the TGV S11 were obtained as follows:a maximum diameter of 65 μm, height of 360 μm, and minimum diameter of 44 μm. The optimal combination parameters were verified. The simulation results of the optimal combination parameters are 1.593 5 dB less than the S11 of the basic model, and the structure of the TGV is optimized.

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  • 收稿日期:2022-07-17
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  • 在线发布日期: 2024-06-27
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