具有低EMI和低开启损耗的浮空P区IGBT研究
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(西南交通大学 微电子研究所, 成都 611756)

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肖 蝶(1998—),女(汉族),四川遂宁人,硕士研究生,研究方向为功率半导体器件。 冯全源(1963—),男(汉族),江西景德镇人,教授,博士生导师,从事模拟集成电路、移动天线与智能天线、 功率半导体器件研究。通信作者。 李嘉楠(1998—),男(汉族),江西丰城人,硕士研究生,研究方向为功率半导体器件。

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中图分类号:

TN342

基金项目:

国家自然科学基金资助项目(62090012);四川省重点研发项目(2023YFG0004)


Study on a Floating P-Base IGBT with Low EMI and Turn-On Losses
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(Institute of Microelectronics, Southwest Jiaotong University, Chengdu 611756, P. R. China)

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    摘要:

    为了优化浮空P区IGBT结构的电磁干扰噪声(EMI)与开启损耗(Eon)的折中关系,提出一种假栅沟槽连接多晶硅阻挡层的浮空P区IGBT结构。新结构在浮空P区内引入对称的两个假栅沟槽,并通过多晶硅层连接。假栅沟槽将浮空P区分为三部分,减少了栅极沟槽附近的空穴积累,降低了栅极的固有位移电流。二维结构仿真表明,在小电流开启时,该结构与传统结构相比,栅极沟槽空穴电流密度减小90%,明显降低了集电极电流(ICE)过冲峰值和栅极电压(VGE)过冲峰值,提高了栅极电阻对dICE/dt和dVKA/dt的控制能力。在相同的开启损耗下,新结构的dICE/dt、dVCE/dt和dVKA/dt最大值分别降低32.22%、38.41%和12.92%,降低了器件的EMI噪声,并改善了器件EMI噪声与开启损耗的折中关系。

    Abstract:

    To optimize the trade-off relationship between EMI and Eonfor the floating P-base IGBT structure, a floating P-base IGBT structure with a dummy gate trench connected to a poly barrier layer was proposed. Two symmetrical dummy gate trenches were introduced in the floating P-base of the new structure, which were connected to each other by polysilicon. The dummy gate trenches divided the floating P-base into three parts, which decreased the number of holes accumulated near the gate trench and the inherent gate displacement current. The simulation results of the two-dimensional structure show that, compared with conventional IGBT, the proposed structure’s hole current density near the gate trench is reduces by 90% at low turn-on current. This reduction significantly reduces the peak values of collector current overshoot (ICE) and gate voltage overshoot (VGE), thereby improving the control capability of the gate resistance at dICE/dt and dVKA/dt. For the same turn-on loss, the maximum values of dICE/dt, dVCE/dt and dVKA/dt in the new structure are reduced by 32.22%, 38.41% and 12.92% respectively, thus reducing EMI noise and improving the trade-off between EMI noise and turn-on loss of the device.

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  • 收稿日期:2023-06-15
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  • 在线发布日期: 2024-04-01
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